Re: Semiconductor Clean Rooms

[Paul Lavely <lavelyp@uclink4.berkeley.edu>]

Yes, we found a researcher who had built an "ion inplanter" that was made
of aluminum rather than stainless steal. Result >500 mrem per hour.  We
shielded it and all is OK now.

Paul Lavely
lavelyp@uclink4.berkeley.edu

>RADSAFErs,
>
>My office has just completed a safety review of our Electrical
>Engineering Department in which we visited some representative labs and
>facilities.  This department is interested in materials engineering and
>semiconductor development in a big way and have an extensive
>semiconductor clean room suite.  There are SEMs and quite a number of
>devices that generate RF plasmas (and evidently some UV also) and
>something called a mask aligner with a UV-generating super high pressure
>Hg lamp. Old familiar SEMs I'm comfortable with and I understand their
>hazards, but I feel uncertain about what the hazards are and what the
>degree of hazard of many of the other devices is.  Do any of you have
>experience with these kinds of operations?  Can you suggest issues to
>keep an eye out for and specific kinds of equipment you typically find
>in semiconductor operations that will present health physics concerns?
>We've got IHs here and a general safety guy and I'll let them worry
>about the non-HP stuff, but I'd be glad for any advice and comments you
>can offer about HP stuff (including the nonionizing side of things).
>Thanks in advance for your help.
>
>Sue Dupre
>
>=======================================================
>Sue M. Dupre, Health Physicist
>
>Environmental Health and Safety Office
>262 Alexander Street
>Princeton University
>Princeton, NJ  08544
>
>E-mail: dupre@princeton.edu
>Phone:  (609) 258-6252
>Fax:    (609) 258-1804
>
>Visit the EHS Web site at http://www.princeton.edu/~ehs
>=======================================================
>************************************************************************
>The RADSAFE Frequently Asked Questions list, archives and subscription
>information can be accessed at http://www.ehs.uiuc.edu/~rad/radsafe.html



************************************************************************
The RADSAFE Frequently Asked Questions list, archives and subscription
information can be accessed at http://www.ehs.uiuc.edu/~rad/radsafe.html