RE: Semiconductor Clean Rooms

["Jean-Francois, Stephane" <stephane_jeanfrancois@merck.com>]

My speciality, graduating from Physics engineering was Material Studies and
as I recall from the university set-up (not industrial), the only highly
hazardous (HP stand point) operation regarding semi-con, optoelectronics and
photonics was doping, using ionic implantation. I was impressed by the
accelerator back then but not as impressed with the hazardous chemicals
involved in a clean room set up like HF, Phosphine, Arsine etc. with the
MOCVD technique Metall-Organic Chemical Vapor Deposition.

I would recommend that you gather the information on the exact purpose of
the operations so you can focus on the issue, step, by step. But I will look
back in some of my book with an HP eye and let you know if I found something
else.

Enclosed, the link to the research group in Semi-Con studies at Ecole
Polytechnique. should you need more detail and Dr. Arthur Yelon coordinates,
contact me by E-mail.

http://mocvd1.phys.polymtl.ca/eindex.htm

Stephane Jean-Francois , P. Eng.
Spécialiste en radioprotection/Radiation Safety Specialist
Gestion des Risques/Risk Management
Merck Frosst Canada Inc.
Tel: (514) 428.8695
Fax: (514) 428.4917
e-mail: stephane_jeanfrancois@merck.com

> ----------
> From: 	Sue Dupre[SMTP:dupre@Princeton.EDU]
> Sent: 	Thursday, December 03, 1998 4:38 PM
> To: 	Multiple recipients of list
> Subject: 	Semiconductor Clean Rooms
> 
> RADSAFErs,
> 
> My office has just completed a safety review of our Electrical
> Engineering Department in which we visited some representative labs and
> facilities.  This department is interested in materials engineering and
> semiconductor development in a big way and have an extensive
> semiconductor clean room suite.  There are SEMs and quite a number of
> devices that generate RF plasmas (and evidently some UV also) and
> something called a mask aligner with a UV-generating super high pressure
> Hg lamp. Old familiar SEMs I'm comfortable with and I understand their
> hazards, but I feel uncertain about what the hazards are and what the
> degree of hazard of many of the other devices is.  Do any of you have
> experience with these kinds of operations?  Can you suggest issues to
> keep an eye out for and specific kinds of equipment you typically find
> in semiconductor operations that will present health physics concerns? 
> We've got IHs here and a general safety guy and I'll let them worry
> about the non-HP stuff, but I'd be glad for any advice and comments you
> can offer about HP stuff (including the nonionizing side of things). 
> Thanks in advance for your help.
> 
> Sue Dupre
> 
> =======================================================
> Sue M. Dupre, Health Physicist
> 
> Environmental Health and Safety Office      
> 262 Alexander Street    
> Princeton University                           
> Princeton, NJ  08544
> 
> E-mail: dupre@princeton.edu
> Phone:  (609) 258-6252
> Fax:    (609) 258-1804
> 
> Visit the EHS Web site at http://www.princeton.edu/~ehs
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